Axcelis to Present at Seventh Annual Needham Growth Conference

    Business Editors
    7th Annual Needham Growth Conference

    BEVERLY, Mass.--(BUSINESS WIRE)--Jan. 3, 2005--Axcelis Technologies, Inc. (Nasdaq: ACLS) is pleased to announce that Stephen Bassett, CFO, and James Kawski, director of investor relations and corporate development, will be presenting at the Seventh Annual Needham Growth Conference. This year's conference will be held January 11-14, 2005, at the New York Palace Hotel.
    Bassett and Kawski will present on Wednesday, January 12 at 9:00am EST. For those who cannot attend, the presentation will be available via live Webcast and archived for 30 days, accessible on the Axcelis Web site at www.axcelis.com.

    About Axcelis Technologies, Inc.

    Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, and Rockville, Maryland as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.

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CONTACT: Axcelis Technologies, Inc. Company Contact: Maureen Hart, 978-787-4266 Fax: 978-787-4275 maureen.hart@axcelis.com Investor Contact: James Kawski, 978-787-4000 Fax: 978-787-9133 investor.relations@axcelis.com or Agency Contact: Loomis Group Stacy Grisinger, 617-638-0022 Fax: 617-638-0033 grisingers@loomisgroup.com

KEYWORD: MASSACHUSETTS NEW YORK INDUSTRY KEYWORD: HARDWARE SOFTWARE TRADESHOW CONFERENCE CALLS SOURCE: Axcelis Technologies, Inc.

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